|
Volumn 20, Issue 3, 2003, Pages 110-111
|
Bringing down NRE
|
Author keywords
[No Author keywords available]
|
Indexed keywords
COSTS;
CURRENT DENSITY;
ELECTRON BEAM LITHOGRAPHY;
LOGIC DESIGN;
MASKS;
PHOTORESISTS;
PRODUCTION ENGINEERING;
THROUGHPUT;
NONRECURRING ENGINEERING (NRE);
INTEGRATED CIRCUIT LAYOUT;
|
EID: 0037706749
PISSN: 07407475
EISSN: None
Source Type: Journal
DOI: None Document Type: Review |
Times cited : (2)
|
References (1)
|