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Volumn 92, Issue , 2003, Pages 187-190
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Modelling the growth of chemical oxide for advanced surface preparation
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Author keywords
Diffusion; IR; Kinetic; Peroxide and ozonized mixtures; Silicon oxidation
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Indexed keywords
CLEANING;
CRYSTAL GROWTH;
INTERFACES (MATERIALS);
MIXTURES;
OXIDATION;
PH EFFECTS;
SURFACE TREATMENT;
THERMAL EFFECTS;
CHEMICAL OXIDE;
OZONIZED;
SURFACE PREPARATION;
PEROXIDES;
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EID: 0037701658
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.92.187 Document Type: Conference Paper |
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Times cited : (2)
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References (5)
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