Color center formation and time-resolved photoluminescence by ArF excimer laser irradiation in CaF2 single crystal

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3424, Issue , 1998, Pages 60-70

  Mizuguchi, Masafumi ^c   Hosono, Hideo ^c   Kawazoe, Hirosi ^a   Ogawa, Tohru ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

^c NONE

Author keywords

ArF excimer laser; CaF2 single crystal; Rare earth ion; Time resolved photoluminescence; Yttrium associated F center

Indexed keywords

CALCIUM COMPOUNDS; COLOR CENTERS; EXCIMER LASERS; LASER BEAM EFFECTS; LIGHT ABSORPTION; PHOTOLUMINESCENCE;

SELF-TRAPPED EXCITONS;

SINGLE CRYSTALS;

EID: 0037698768     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.323756     Document Type: Conference Paper

References (20)

1. W. Hayes and A. M. Stoneham: ColorCenter, in Crystals-with the Fluorite Structure, ed. by W. Hayes (Oxford Univ. Press, London 1974)
2. W. Hayes and D. L. Staebler: Oxidation-Reduction Reaction and Photochromism, in Crystals with the Fluorite Structure, ed. by W. Hayes ( Oxford Univ. Press, London 1974)
3. P. Görlich, H. Karras and R. Lehmann, Phys. Stat. Sol. 1, 389 (1961)
4. T. Kamikawa and K. Ozawa, J. Phys. Soc. Jpn 24, 115 (1968)
5. P. Görlich, H. Karras, C. Symanowski and P. Ullmann, Phys. Stat. Sol. 25, 93 (1968)
6. J. H. Beaumont, W. Hayes, D. L. Kirk and G. P. Summers, Proc. Roy. Soc. Lond. A 315, 69 (1970)
7. C. R. A. Catlow, J. Phys. C 12, 969 (1979)
8. C. H. Anderson and E. S. Sabisky, Phys. Rev. B 3, 527 (1971)
9. J. F. Sabatini, A. E. Salwin and D. S. McClure, Phys. Rev. B 11, 3832 (1971)
10. K. S. Song and R. T. Williams: Alkaline Earth Fluorides, in Self-Trapped Excitons ( Springer-Verlag, Berlin 1996)
11. R. T. Williams and E. J. Friebele: Optical Materials: Radiation damage, in CRC Handbook of Laser Science and Technology, vol. III, Pt.1, ed. by M. J. Weber ( CRC Press, Florida 1986)
12. W. J. Scouler and A. Smakula, Phys. Rev. 120, 1154 (1960)
13. D. L. Staebler and S. E. Schnatterly, Phys. Rev. B 3, 516 (1971)
14. A. K. Bates et al., Abst. of 3rd Int. Symp. on 193 nm Litho., pp. 19 (1997)
15. M. Vukcevich et al., Abst. of 3rd Int. Symp. on 193 nm Litho., pp. 21 (1997)
16. S. B. Mirov et.al., Mater. Sci. Four. 239-241, 227 (1997)
17. K. Kawano and R. Nakata, Mater. Sci. Four. 239-241, 761 (1997)
18. N. Rabbiner, J. Opt. Soc. Am. 55, 436 (1965)
19. G. H. Dieke and H. M. Crosswhite, Appl. Opt. 2, 675 (1963)
20. A. Smakula, Z. Phys. 59, 603 (1930)