Nanocomposite coatings within the system Ti-B-N deposited by plasma assisted chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 3, 2003, Pages 1084-1091

  Stoiber, M ^a   Mitterer, C ^a   Schoeberl, T ^a   Badisch, E ^b   Fontalvo, G ^b   Kullmer, R ^c  

^a UNIVERSITY OF LEOBEN   (Austria)

^b MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^c RUBIG GmbH & co KG Engineering   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLIC LOADS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESS ANALYSIS; WEAR OF MATERIALS;

BIAXIAL STRESSES;

INORGANIC COATINGS;

EID: 0037698044     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1570846     Document Type: Article

References (34)

1. C. Mitterer, M. Rauter, and P. Rödhammer, Surf. Coat. Technol. 41, 351 (1990).
2. W. Gissler, Surf. Coat. Technol. 68/69, 556 (1994).
3. T. P. Mollart, J. Haupt, R. Gilmore, and W. Gissler, Surf. Coat. Technol. 86-87, 231 (1996).
4. C. Rebholz, A. Leyland, P. Larour, C. Charitidis, S. Logothetidis, and A. Matthews, Surf. Coat. Technol. 116-119, 648 (1999).
5. C. Mitterer et al., Surf. Coat. Technol. 120-121, 405 (1999).
6. P. Losbichler, C. Mitterer, P. N. Gibson, F. Hofer, and P. Warbichler, Surf. Coat. Technol. 94-95, 297 (1997).
7. R. Wiedemann, V. Weihnacht, and H. Oettel, Surf. Coat. Technol. 116-119, 302 (1999).
8. C. Mitterer, P. Losbichler, F. Hofer, P. Warbichler, P. N. Gibson, and W. Gissler, Vacuum 50, 313 (1998).
9. M. S. Wong and Y. C. Lee, Surf. Coat. Technol. 120-121, 194 (1999).
10. L. Chaleix and J. Machet, Surf. Coat. Technol. 91, 74 (1997).
11. J. Laimer, H. Karner, H. Störi, and P. Rödhammer, Mater. Sci. Forum 140-142, 439 (1993).
12. C. Mitterer, F. Holler, C. Lugmair, R. Nöbauer, R. Kullmer, and C. Teichert, Surf. Coat. Technol. 142-144, 1005 (2001).
13. C. Pfohl and K.-T. Rie, Surf. Coat. Technol. 116-119, 911 (1999).
14. D. Heim, F. Holler, and C. Mitterer, Surf. Coat. Technol. 116-119, 497 (1999).
15. M. Stoiber, M. Panzenböck, C. Mitterer, and C. Lugmair, Surf. Coat. Technol. 142-144, 117 (2001).
16. Th. H. De Keijser, J. I. Langford, E. J. Mittemeijer, and A. B. P. Vogels, J. Appl. Crystallogr. 15, 308 (1982).
17. H. P. Klug and L. E. Alexander, X-Ray Diffraction Procedures, 2nd ed. (Wiley, New York, 1974), p. 661.
18. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
19. P. H. Mayrhofer and C. Mitterer, Surf. Coat. Technol. 133-134, 131 (2000).
20. H. Novotny, F. Benesovsky, C. Brukl. and O. Schob, Mh. Chem. 92, 403 (1961).
21. J. A. Thornton, in Deposition Technologies for Films and Coatings, edited by R. F. Bunshah (Noyes, Park Ridge, NJ, 1982), pp. 170, 243.
22. J. Patscheider, L. Shizhi, and S. Vepřek, Plasma Chem. Plasma Process. 16, 431 (1996).
23. Powder Diffraction File (JCPDS International Center for Diffraction Data, Swarthmore, PA, 1992).
24. I. Petrov, L. Hultman, J.-E. Sundgren, and J. W. Greene, J. Vac. Sci. Technol. A 10, 265 (1992).
25. DIN Fachbericht 39, edited by H. Jehn, G. Reiners, and N. Siegel (Beuth, Berlin, Germany, 1993), pp. 210, 213.
26. P. Haasen, Physical Metallurgy, 3rd ed. (Cambridge University Press, London, UK, 1978).
27. M. Stoiber, E. Badisch, C. Lugmair, and C. Mitterer, Surf. Coat. Technol. (in press).
28. J. Schiøtz, F. F. Di Tolla, and K. W. Jacobsen, Nature (London) 391, 561 (1998).
29. J. Musil, Surf. Coat. Technol. 125, 322 (2000).
30. A. Leyland and A. Matthews, Wear 246, 1 (2000).
31. H. S. Kim and M. B. Bush, Nanostruct. Mater. 11, 361 (1999).
32. D. S. Rickerby, G. Eckold, K. T. Scott, and I. M. Buckley-Golder, Thin Solid Films 154, 125 (1987).
33. C. Friedrich, G. Berg, E. Broszeit, and C. Berger, Materialwiss. Werkstofftech. 28, 59 (1997).
34. E. Badisch, M. Stoiber, G. Fontalvo, and C. Mitterer, Surf. Coat. Technol. (in press).