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Volumn 104, Issue , 2003, Pages 595-598
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Hard x-ray shearing interferometry
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFRACTION GRATINGS;
ELECTRON BEAM LITHOGRAPHY;
ETCHING;
INTEGRAL EQUATIONS;
INTERFEROMETERS;
LIGHT INTERFERENCE;
POLYSTYRENES;
SHEARING;
VIBRATIONS (MECHANICAL);
WAVEFRONTS;
X RAY OPTICS;
BONSE-HART INTERFEROMETER;
HARD X RAY SHEARING INTERFEROMETRY;
MACH-ZENDER TYPE;
MOIRE PATTERN;
WAVEFRONT DISTORTION;
WET CHEMICAL ETCHING;
INTERFEROMETRY;
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EID: 0037687704
PISSN: 11554339
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1051/jp4:20030152 Document Type: Conference Paper |
Times cited : (2)
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References (7)
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