Fabrication of slot antenna array coupled warm carrier far-infrared radiation detectors

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 528-533

  Yasuoka, Yoshizumi ^a   Suzuki, Kenji ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

Far infrared detector; Slot antenna array; Thin film antenna; Warm carrier device

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; INFRARED DETECTORS; PHOTOLITHOGRAPHY; SLOT ANTENNAS; THIN FILMS; WAVEGUIDES;

WARM CARRIER DEVICES;

ANTENNA ARRAYS;

EID: 0037682254     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00110-2     Document Type: Conference Paper

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