|
|
Volumn 42, Issue 5 A, 2003, Pages
|
|
Electron-beam diameter measurement using a knife edge with a visor for scattering electrons
|
|
Author keywords
Beam diameter; Electron beam nanolithography; Knife edge; Monte Carlo simulation; Scattering electron
|
|
Indexed keywords
COMPUTER SIMULATION;
ELECTRON BEAMS;
ELECTRON SCATTERING;
LITHOGRAPHY;
MONTE CARLO METHODS;
NANOTECHNOLOGY;
ELECTRON BEAM DIAMETER MEASUREMENT;
FULL WIDTH HALF MAXIMUM;
KNIFE EDGE;
VISOR;
ELECTRON BEAM LITHOGRAPHY;
|
|
EID: 0037670861
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.l491 Document Type: Letter |
|
Times cited : (12)
|
|
References (5)
|
