The piezoresistance of aluminum alloy interconnect structures

Journal of Applied Physics

Volumn 85, Issue 3, 1999, Pages 1943-1948

  Reilly, Christopher J ^a   Sanchez Jr , John E ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037659171     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369173     Document Type: Article

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