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Volumn 6, Issue 5, 2003, Pages

Corrosion of copper in BTA solutions

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; COMPOSITION EFFECTS; CORROSION; ELECTRODES; FILMS; ORGANIC COMPOUNDS; REMOVAL; SURFACE PHENOMENA;

EID: 0037652280     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1561278     Document Type: Article
Times cited : (22)

References (15)
  • 11
    • 0038645263 scopus 로고    scopus 로고
    • WO Pat. 00/28586
    • D. Chopra, WO Pat. 00/28586 (2000).
    • (2000)
    • Chopra, D.1
  • 12
    • 0037968992 scopus 로고    scopus 로고
    • WO Pat. 00/24842
    • D. Mahulikar, WO Pat. 00/24842 (2000).
    • (2000)
    • Mahulikar, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.