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Volumn 6, Issue 5, 2003, Pages
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Corrosion of copper in BTA solutions
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL MECHANICAL POLISHING;
COMPOSITION EFFECTS;
CORROSION;
ELECTRODES;
FILMS;
ORGANIC COMPOUNDS;
REMOVAL;
SURFACE PHENOMENA;
ANODIC INHIBITOR;
BENZOTRIAZOLE;
OPEN CIRCUIT POTENTIAL;
PASSIVE FILM;
SCRATCHING;
COPPER;
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EID: 0037652280
PISSN: 10990062
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1561278 Document Type: Article |
Times cited : (22)
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References (15)
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