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Volumn , Issue , 2003, Pages 11-16

Modeling and experimental verification of the effect of gate oxide breakdown on CMOS inverters

Author keywords

CMOS; Dielectric breakdown; Hard breakdown; Leakage currents; Oxide breakdown; Oxide reliability

Indexed keywords

CMOS INTEGRATED CIRCUITS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN; LEAKAGE CURRENTS; STATIC RANDOM ACCESS STORAGE;

EID: 0037634817     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (23)

References (17)
  • 1
    • 0032275853 scopus 로고    scopus 로고
    • Reliability projection for ultra-thin oxides at low voltage
    • H. Stathis and D. J. DiMaria, "Reliability projection for ultra-thin oxides at low voltage," in IEDM Tech. Dig., 1998, pp. 167-170; R. Degraeve, B. Kaczer, and G. Groeseneken, "Reliability: a possible showstopper for oxide thickness scaling?," Semicond. Sci. Technol., vol. 15, 2000, pp. 436-444.
    • (1998) IEDM Tech. Dig. , pp. 167-170
    • Stathis, H.1    Dimaria, D.J.2
  • 2
    • 0033752184 scopus 로고    scopus 로고
    • Reliability: A possible showstopper for oxide thickness scaling?
    • H. Stathis and D. J. DiMaria, "Reliability projection for ultra-thin oxides at low voltage," in IEDM Tech. Dig., 1998, pp. 167-170; R. Degraeve, B. Kaczer, and G. Groeseneken, "Reliability: a possible showstopper for oxide thickness scaling?," Semicond. Sci. Technol., vol. 15, 2000, pp. 436-444.
    • (2000) Semicond. Sci. Technol. , vol.15 , pp. 436-444
    • Degraeve, R.1    Kaczer, B.2    Groeseneken, G.3
  • 5
    • 0038782425 scopus 로고    scopus 로고
    • A thorough investigation of progressive breakdown in ultra-thin oxides. Physical understanding and application for industrial reliability assessment
    • F. Monsieur, E. Vincent, D. Roy, S. Bruyere, J. C. Vildeuil, G. Pananakakis, G. Ghibaudo, "A thorough investigation of progressive breakdown in ultra-thin oxides. Physical understanding and application for industrial reliability assessment", IRPS Proc. 2002, pp. 45-54.
    • (2002) IRPS Proc. , pp. 45-54
    • Monsieur, F.1    Vincent, E.2    Roy, D.3    Bruyere, S.4    Vildeuil, J.C.5    Pananakakis, G.6    Ghibaudo, G.7
  • 6
    • 0036865481 scopus 로고    scopus 로고
    • Voltage dependence of hard breakdown growth and the reliability implication in thin dielectrics
    • B. P. Linder, S. Lombardo, J. H. Stathis, A. Vayshenker and D. J. Frank, "Voltage dependence of hard breakdown growth and the reliability implication in thin dielectrics", IEEE Electron Device Lett., vol. 23, No. 11, 2002, pp. 661-663.
    • (2002) IEEE Electron Device Lett. , vol.23 , Issue.11 , pp. 661-663
    • Linder, B.P.1    Lombardo, S.2    Stathis, J.H.3    Vayshenker, A.4    Frank, D.J.5
  • 7
    • 0033700294 scopus 로고    scopus 로고
    • A high performance 0.1 μm SOI CMOS technology with Cu interconnects and low-k BEOL dielectric
    • P. Smeys, et al., "A high performance 0.1 μm SOI CMOS technology with Cu interconnects and low-k BEOL dielectric," VLSI Tech. Symp., 2000, pp. 184-185.
    • (2000) VLSI Tech. Symp. , pp. 184-185
    • Smeys, P.1
  • 9
    • 21544467967 scopus 로고
    • Trap creation in silicon dioxide produced by hot electrons
    • D. J. DiMaria and J. W. Stasiak, "Trap creation in silicon dioxide produced by hot electrons", J. Appl. Phys. vol. 65, No. 6, 1989, pp. 2342-2356.
    • (1989) J. Appl. Phys. , vol.65 , Issue.6 , pp. 2342-2356
    • Dimaria, D.J.1    Stasiak, J.W.2
  • 11
    • 0027803918 scopus 로고
    • A bi-directional NMOSFET current reduction model for simulation of hot-carrier induced circuit degradation
    • K. N. Quader, C. C. Li, R. Tu, E. Rosenbaum, P. K. Ko, C. Hu, "A bi-directional NMOSFET current reduction model for simulation of hot-carrier induced circuit degradation", IEEE Trans. Electron Devices, vol. 40, No. 12, 1993, pp. 2245-2254.
    • (1993) IEEE Trans. Electron Devices , vol.40 , Issue.12 , pp. 2245-2254
    • Quader, K.N.1    Li, C.C.2    Tu, R.3    Rosenbaum, E.4    Ko, P.K.5    Hu, C.6
  • 12
    • 59949096250 scopus 로고    scopus 로고
    • Relation between breakdown mode and breakdown location in short channel NMOSFETS and its impact on reliability specifications
    • R. Degraeve, B. Kaczer, A. De Keersgieter, G. Groeseneken, "Relation between breakdown mode and breakdown location in short channel NMOSFETS and its impact on reliability specifications", IRPS Proc. 2001, pp. 360-366.
    • (2001) IRPS Proc. , pp. 360-366
    • Degraeve, R.1    Kaczer, B.2    De Keersgieter, A.3    Groeseneken, G.4
  • 14
  • 15
    • 0035308547 scopus 로고    scopus 로고
    • The impact of intrinsic device fluctuations on CMOS SRAM cell stability
    • A. J. Bhavnagarwala, X. Tang, and J. D. Meindl, "The impact of intrinsic device fluctuations on CMOS SRAM cell stability," IEEE J. Solid State Circuits, vol. 36, 2001, pp. 658-665.
    • (2001) IEEE J. Solid State Circuits , vol.36 , pp. 658-665
    • Bhavnagarwala, A.J.1    Tang, X.2    Meindl, J.D.3
  • 16
    • 18844480284 scopus 로고    scopus 로고
    • High-performance sub-0.08 μm CMOS with dual gate oxide and 9.7 ps inverter delay
    • M. Hargrove, et al., "High-performance sub-0.08 μm CMOS with dual gate oxide and 9.7 ps inverter delay," in IEDM Tech Dig., 1998, pp. 627-630.
    • (1998) IEDM Tech Dig. , pp. 627-630
    • Hargrove, M.1
  • 17
    • 0036289401 scopus 로고    scopus 로고
    • The circuit and physical design of the POWER4 microprocessor
    • J. Warnock et al., "The circuit and physical design of the POWER4 microprocessor," IBM J. Res. Dev. 2002, vol. 46, pp. 27-52.
    • (2002) IBM J. Res. Dev. , vol.46 , pp. 27-52
    • Warnock, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.