Photolithographic processing of hybrid glasses for microoptics

Journal of Lightwave Technology

Volumn 21, Issue 3, 2003, Pages 614-623

  Kärkkäinen, Ari H O ^a,b   Rantala, Juha T ^c   Tamkin, John M ^b   Descour, Michael R ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF ARIZONA   (United States)

^c NONE

Author keywords

Hybrid glass materials; Microoptics; Photolithography; Sol gel

Indexed keywords

DIFFRACTION GRATINGS; FABRICATION; LENSES; LIGHT TRANSMISSION; OPTICAL GLASS; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SOL-GELS;

OPTOMECHANICAL STRUCTURES;

MICROOPTICS;

EID: 0037617535     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.809581     Document Type: Conference Paper

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