Dielectric antireflective coatings for DUV lithography

Solid State Technology

Volumn 40, Issue 3, 1997, Pages 109-114

  Bencher, Christopher ^a   Ngai, Chris ^a   Roman, Bernie ^b   Lian, Sean ^b   Vuong, Tam ^b  

^a APPLIED MATERIALS INC   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037598556     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (14)

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2. T. Perera, "Antireflective Coatings - an Overview," Solid State Technology,Vol. 37, No. 7, pp. 131-136, July 1995.
3. T. Ogawa et al., "Novel ARC Optimization Methodology for KrF Excimer Laser Lithography at Low K1 Factor," Optical/Laser Microlithography V, Vol. 1674, SPIE, 1992.
4. G. Czech et al., "Reduction of Linewidth Variation for the Gate Conductor Level by Lithography Based on New Antireflective Layer," Microelectronic Engineering 21, 1993.
5. T. Ogawa et al., "Practical Resolution Enhancement Effect by New Complete Antireflective Layer in KrF Excimer Laser Lithography," Optical/Laser Microlithography VI, Vol. 1927, SPIE, 1993.
6. T. Gocho et al., "Chemical Vapor Deposition of Antireflective Layer Film for Excimer Laser Lithography," Jpn. J. of Appl. Phys., Vol. 33, 1994.
7. y:H, High Performance Antireflective Layer for the Current and Future Optical Lithography," Vol. 2197, SPIE, 1994.
8. John Sturtevant et al., "Substrate Contamination Effects in the Processing of Chemically Amplified DUV Photoresists," Vol. 2197, SPIE, 1994.
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10. C. A. Mack, Prolith/2 v.4.05a, Finle Technologies, Austin, Texas.
11. A.R. Forouhi, I. Bloomer, n&k Analyzer, n&k Technology, Santa Clara, California.
12. A.R. Forouhi, I. Bloomer, "Optical Dispersion Relations for Amorphous Semiconductors and Amorphous Dielectrics," Phys. Rev. B, p. 7018, 1986.
13. E. Ibok et al., "Optical Characterization of Amorphous and Polycrystalline Silicon Films," Solid State Technology, Vol. 38, No. 8, pp. S11-S20, August 1995.
14. C. A. Mack, "The Lithography Tutor: Swing Curves," Microlithography World, Vol. 3, No. 3, pp. 23-25, Summer 1994.