Super-flat high-reflectivity semi-transparent polarizer for soft x-ray

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2873, Issue , 1996, Pages 105-108

  Haga, Tsuneyuki ^a   Tinone, Marcia C K ^a   Shimada, Masaru ^a   Ohkubo, Takashi ^b   Ozawa, Akira ^b  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; MULTILAYER FILMS; MULTILAYERS; POLARIMETERS; POLARIZATION; PRISMS; REFLECTION; SURFACE ROUGHNESS; SYNCHROTRON RADIATION;

FABRICATION PROCESS; HIGH REPRODUCIBILITY; MO/SI MULTILAYER FILMS; MULTILAYER POLARIZERS; POLARIZATION CHARACTERISTICS; POLARIZATION EXPERIMENTS; SOFT X-RAY REGIONS; TRANSMISSION RATIOS;

X RAYS;

EID: 0037588648     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.246192     Document Type: Conference Paper

References (12)

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