Structural, electrical, and optical studies of GaAs implanted with MeV As or Ga ions

Journal of Electronic Materials

Volumn 26, Issue 5, 1997, Pages 449-458

  Jasinski, J ^a,d   Liliental Weber, Z ^a   Washburn, J ^a   Tan, H H ^b   Jagadish, C ^b   Krotkus, A ^c   Marcinkevicius, S ^c,e   Kaminska, M ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

^d UNIVERSITY OF WARSAW   (Poland)

^e ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

GaAs; Ion implantation; Point defects

Indexed keywords

EID: 0037581464     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0118-4     Document Type: Article

References (35)

1. F.W. Smith, A.R. Calawa, C.L. Chen, M.J. Manfra and L.J. Mahoney, IEEE Electron Dev. Lett. 9, 77 (1988).
2. M. Kaminska, Z. Liliental-Weber, E.R. Weber, T. George, J. B. Kortright, F.W. Smith, B Y. Tsaur and A.R. Calawa, Appl. Phys. Lett. 54, 1881 (1989).
3. D.C. Look, Thin Solid Films 231, 61 (1993).
4. M.R. Melloch, J.M. Woodall, E.S. Hannon, N. Otsuka, F.H. Pollak, D.D. Nolte, R.M. Feenstra and M.A. Lutz, Annul Rev. Mater. Sci. 25, 547 (1995).
5. M. Kaminska, E.R. Weber, Z. Liliental-Weber and R. Leon, J. Vac. Sci. Technol. B 7, 710 (1989).
6. F.W. Smith, H.Q. Lex, V. Diadiuk, M.A. Hollis, A.R. Calawa, S. Gupta, M. Frankel, D.R. Dykear, G.A. Mourov and T.Y. Hsiang, Appl. Phys. Lett. 54, 890 (1989).
7. Z. Liliental-Weber, Mater. Res. Soc. Proc. 198, 371 (1991).
8. Z. Liliental-Weber, W. Swider, K.M. Yu, J. Kortright, F.W. Smith and A.R. Calawa, Appl. Phys. Lett. 58, 2153 (1991); Z. Liliental-Weber, S. Gupta, F. Smith, Semi-Insulating III-V Materials, Ixtapa, Mexico, eds. C.J. Miner, W. Ford and E.R. Weber, (Bristol: Institute of Physics Publishing, 1992), p. 135.
9. Z. Liliental-Weber, W. Swider, K.M. Yu, J. Kortright, F.W. Smith and A.R. Calawa, Appl. Phys. Lett. 58, 2153 (1991); Z. Liliental-Weber, S. Gupta, F. Smith, Semi-Insulating III-V Materials, Ixtapa, Mexico, eds. C.J. Miner, W. Ford and E.R. Weber, (Bristol: Institute of Physics Publishing, 1992), p. 135.
10. Z. Liliental-Weber, F. Namavar and A. Claverie, Ultramicroscopy 52, 570 (1993).
11. A. Claverie, F. Namavar and Z. Liliental-Weber, Appl. Phys. Lett. 62, 1271 (1993).
12. M. Kaminska, E.R. Weber and C. Jagadish, Proc. 8th Conf. on Semi-Insulating III-V Compounds, ed. M. Godlewski (Singapore: World Scientific, 1994), p. 327.
13. A. Kurpiewski, K. Korona, M. Palczewska, C. Jagadish, J. Williams and M. Kaminska, Proc. 8th Conf. on Semi-Insulating III-V Compounds, ed. M. Godlewski (Singapore: World Scientific, 1994), p. 271.
14. A. Krotkus, S. Macinkevicius, J. Jasinski, M. Kaminska, H.H. Tan, C. Jagadish, Appl. Phys. Lett. 66, 3304 (1995).
15. H. Fujioka, J. Krueger, A. Prasad, X. Liu and E.R. Weber and A.K. Verma, J. Appl. Phys. 78, 1470 (1995).
16. C. Jagadish, H.H. Tan, J. Jasinski and M. Kaminska, M. Palczewska, A. Krotkus and S. Marcinkevicius, Appl. Phys. Lett. 67, 1724 (1995).
17. C. Jagadish, H.H. Tan, A. Krotkus, S. Marcinkevicius, K.P. Korona and M. Kaminska, Appl. Phys. Lett. 68, 2225 (1996).
18. A. Krotkus, S. Marcinkevicius, V. Pasiskevicius and U. Olin, Semicond. Sci. Technol. 9, 1382 (1994).
19. X.Q. Zhou, H.M. van Driel, W.W. Ruehle, Z. Gogolak and K. Ploog, Appl. Phys. Lett. 61, 3020 (1992).
20. J. Jasinski, Y. Chen, J. Washburn, Z. Liliental-Weber, H.H. Tan and C. Jagadish and M. Kaminska, Appl. Phys. Lett. 68, 1501 (1996).
21. J.S. Williams and M.W. Austin, Nucl. Instrum. Methods 168, 307 (1980).
22. M. Luysberg, W. Jager and K. Urban, M. Schanzer, N. A. Stolwijk and H. Mehrer, Mater. Sci. Engrg. B 13, 137 (1992).
23. J.F. Ziegler, J.P. Biersack and U. Littmark, The Stopping and Range of Ions in Solids (New York: Pergamon, 1985).
24. Z. Liliental-Weber, K.M. Yu, J. Washburn and D.C. Look, 22, 1395 (1993).
25. Z. Liliental-Weber, W. Swider, H. Kagiichi, A. Claverie, H.H. Wang and J.F. Whitaker, Mater. Res. Soc. Symp. Proc. 378, 677 (Pittsburgh, PA: Mater Res. Soc., 1995).
26. N. F. Mott, Phil. Mag. 19, 835 (1969).
27. R. Coates and E.W.J. Mitchell, J. Phys. C: Solid State Phys. 5, L113 (1972).
28. M. Almonte, E.E. Haller, K.M. Yu, W. Walukiewicz, J. Jasinski and Z. Liliental-Weber, to be published.
29. P. Kraisingdecha, C. Shwe, M. Gal, H.H. Tan and C. Jagadish, Semicond. Sci. Technol. 9, 1489 (1994).
30. M. Kaminska and E.R. Weber, The Physics of Semiconductors, ed. E.M. Anastasskis and J.D. Joannopoulos (Singapore: World Scientific, 1990), p. 473.
31. A.C. Warren, J.M. Woodall, J.L. Freeouf, D. Grischkowsky, D.T. McInturff, M.R. Melloch and N. Otsuka, Appl. Phys. Lett. 57, 1331 (1990).
32. S. Marcinkevicius, A. Krotkus, V. Jasutis, K. Bertulis, H.H. Tan, C. Jagadish and M. Kaminska, Appl. Phys. Lett. 68, 397 (1996).
33. W. Walukiewicz, Z. Liliental-Weber, J. Jasinski, M. Almonte, E.E. Haller, A. Prasad, E.R. Weber, K. Wang and J. Whitaker, Appl. Phys. Lett. 69, 2569 (1996).
34. H.H. Wang, P. Grenier, J.F. Whitaker, H. Fujioka, J. Jasinski and Z. Liliental-Weber, IEEE J. of Selected Topics in Quantum Electronics (Special issue on Ultrafast Electronics, Photonics and Optoelectronics) (1996) in print.
35. A. Prasad, PhD. thesis, University of California, Berkeley 1996.