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Volumn 206, Issue , 2003, Pages 1056-1061

Uptake of light elements of nanoporous layers formed by helium ion implantation

Author keywords

Helium implantation; HERDA; IBA; Nanoporous surfaces; PI3TM

Indexed keywords

DIFFUSION; DOPING (ADDITIVES); HELIUM; NANOSTRUCTURED MATERIALS; PLASMAS; POROSITY; POROUS MATERIALS;

EID: 0037566885     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00933-9     Document Type: Conference Paper
Times cited : (8)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.