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Volumn 206, Issue , 2003, Pages 1056-1061
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Uptake of light elements of nanoporous layers formed by helium ion implantation
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Author keywords
Helium implantation; HERDA; IBA; Nanoporous surfaces; PI3TM
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Indexed keywords
DIFFUSION;
DOPING (ADDITIVES);
HELIUM;
NANOSTRUCTURED MATERIALS;
PLASMAS;
POROSITY;
POROUS MATERIALS;
NANOPOROUS CAVITY STRUCTURES;
ION IMPLANTATION;
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EID: 0037566885
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(03)00933-9 Document Type: Conference Paper |
Times cited : (8)
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References (15)
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