Investigation of interface roughness and roughness correlation in solid-state multilayer by coplanar diffuse X-ray scattering

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 201-203

  Busch, Ingo ^a   Stümpel, Jürgen ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Interfaces; Roughness; X ray reflectometry

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; INTERFACES (MATERIALS); METALLORGANIC VAPOR PHASE EPITAXY; MOLECULAR BEAM EPITAXY; THIN FILMS; X RAY SCATTERING;

INTERFACE ROUGHNESS;

MULTILAYERS;

EID: 0037566124     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00075-8     Document Type: Conference Paper

References (4)

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2. Parratt L.G., Hempstedt C.F., Phys. Rev. 94:1954;1593.
3. Holy V., Baumbach T., Phys. Rev. B. 49:1994;10668.
4. J. Stümpel, I. Busch, Characterization of interfaces by means of X-ray scattering, PTB news 02.2, 2002.