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Volumn 42, Issue 9-11, 2002, Pages 1771-1776

Reliability of MEMS - A methodical approach

Author keywords

[No Author keywords available]

Indexed keywords

MICROSENSORS;

EID: 0037555861     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00229-9     Document Type: Conference Paper
Times cited : (23)

References (8)
  • 2
    • 0012526042 scopus 로고    scopus 로고
    • Overview of automotive sensors
    • W. J. Fleming, "Overview of Automotive Sensors", IEEE Sensors Journal, vol. 1, no. 4 (2001) 296
    • (2001) IEEE Sensors Journal , vol.1 , Issue.4 , pp. 296
    • Fleming, W.J.1
  • 3
    • 33846359007 scopus 로고    scopus 로고
    • Markets and opportunities for MEMS/MST in automotive applications
    • Springer Verlag (Berlin,)
    • R. Grace, "Markets and Opportunities for MEMS/MST in Automotive Applications", Advanced Microsystems for Automotive Applications, Yearbook 2002, Springer Verlag (Berlin, 2002) 3
    • (2002) Advanced Microsystems for Automotive Applications, Yearbook 2002 , pp. 3
    • Grace, R.1
  • 4
    • 0035767660 scopus 로고    scopus 로고
    • Reliability of Mi-croelectromechanical systems (MEMS)
    • Reliability, Testing, and Characterization of MEMS/MOEMS, R. Ramesham (ed.)
    • S. Tadigadapa, N. Najafi, "Reliability of Mi-croelectromechanical Systems (MEMS)", Reliability, Testing, and Characterization of MEMS/MOEMS, R. Ramesham (ed.), Proc. SPIE Vol. 4558 (2001) 197-205
    • (2001) Proc. SPIE , vol.4558 , pp. 197-205
    • Tadigadapa, S.1    Najafi, N.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.