Modeling of waterjet guided laser grooving of silicon

International Journal of Machine Tools and Manufacture

Volumn 43, Issue 9, 2003, Pages 925-936

  Li, C F ^a   Johnson, D B ^a   Kovacevic, R ^a  

^a SOUTHERN METHODIST UNIVERSITY   (United States)

Author keywords

Laser; Modeling; Thermal process; Waterjet

Indexed keywords

JETS; LASER BEAM CUTTING; SILICON; THERMAL EFFECTS;

LASER GROOVING;

LASER BEAM EFFECTS;

EID: 0037542757     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(03)00063-4     Document Type: Article

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