The state of the art of photochemical machining at the start of the twenty-first century

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 217, Issue 5, 2003, Pages 643-650

  Allen, D M ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Photochemical machining; Photoetching; Photofabrication; Roadmap

Indexed keywords

ENVIRONMENTAL IMPACT; ETCHING; FABRICATION; INTEGRATED CIRCUIT MANUFACTURE; MARKETING; MASKS; PHOTOCHEMICAL REACTIONS; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE;

PHOTOCHEMICAL MACHINING; PHOTOETCHING; PHOTOFABRICATION;

MACHINING;

EID: 0037526283     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/095440503322011362     Document Type: Article

References (18)

1. Allen, D. M. The Principles and Practice of Photochemical Machining and Photoetching, 1986 (Adam Hilger, IOP, Bristol).
2. van Luttervelt, C. A. On the selection of manufacturing methods illustrated by an overview of separation techniques for sheet materials. Ann. CIRP, 1989, 38(2), 587-607.
3. Allen, D. M., Gillbanks, P. J. and Palmer, A. J. The selection of an appropriate method to manufacture thin sheet metal parts based on technical and financial considerations. In Proceedings of International Symposium on Electro-Machining (ISEM-9), Nagoya, Japan, 1989, pp. 246-249.
4. Greiner, P. Results of PCMI industry trends survey 2000. PCMI J., March 2002, 84, 27-35.
5. Allen, D. M. and Ler, L. T. Increasing utilisation efficiency of ferric chloride etchant in industrial photochemical machining. J. Environ. Monit., 1999, 1, 103-108.
6. Allen, D. M. The etching of iron with ferric chloride solution as a model for a technical and economic comparison of three spent etchant regeneration systems. Processing Advd Mater., 1991, 1(2), 69-75.
7. Allen, D. M. and White, H. J. A. Chlorine regeneration of ferric chloride solutions used for photochemical machining of iron. Processing Advd Mater., 1992, 2(1) 19-24.
8. Allen, D. M. and Ler, L. T. The potential for oxygen regeneration of spent ferric chloride etchant solutions. PCMI J., Winter 1995, 59, 3-7.
9. IBM, Regeneration of ferric chloride etchants. US Pat. 5,227,010, 13 July 1993.
10. Allen, D. M. and White, H. J. A. Nickel etching economics. PCMI J., Fall 1992, 50, 4-11.
11. Allen, D. M. and White, H. J. A. Nickel extraction from ferric chloride etchant. PCMI J., Summer/Fall 1994, 57/58, 15, 18-25.
12. Toppan Printing Company, Apparatus for separating heavy metals from a ferric chloride waste fluid. US Pat. 4,940,337, 10 July 1990.
13. Zhao, G. and Richardson, H. W. An efficient method for nickel removal from iron chloride solutions. PCMI J., March 2002, 84, 5-14.
14. Allen, D. M. The PCM roadmap and an analysis of PCM markets. Galvanotechnik, March 2002, 93(3), 782-786.
15. Cane, P. The stencil - a brief explanation. PCMI J., September 2000, 78, 5-12.
16. Allen, D. M. Progress towards clean technology for photochemical machining. Ann. CIRP, 1993, 42(1), 197-200.
17. Allen, D. M. Automation in photochemical machining. In Proceedings of 3rd International Conference on Automation Technology, Taipei, Taiwan, July 1994, Vol. 1, pp. 185-191.
18. Allen, D. M. Electrolytisches Photoätzen (in German). Galvanotechnik, June 1993, 84(6), 1873-1878.