ECR deposition of hydrogenated diamond-like amorphous carbon films using acetylene-oxygen plasmas

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 983-987

  Adamopoulos, G ^a   Godet, C ^a   Drevillon B ^a   Saito, Y ^b   Batchelder, D N ^b   Grosman, A ^c   Ortega, C ^c  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b UNIVERSITY OF LEEDS   (United Kingdom)

^c CNRS   (France)

Author keywords

ECR deposition; Hydrogenated amorphous carbon; Raman spectroscopy; Spectroscopic ellipsometry

Indexed keywords

AMORPHOUS MATERIALS; BAND STRUCTURE; HYDROGENATION; PARTIAL PRESSURE; RAMAN SPECTROSCOPY;

SPECTROSCOPIC ELLIPSOMETRY (SE);

DIAMOND LIKE CARBON FILMS;

DIAMOND;

EID: 0037508672     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00313-8     Document Type: Article

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