Density functional theory analysis of infrared modes in carbon-incorporated SiO2

Applied Physics Letters

Volumn 82, Issue 13, 2003, Pages 2041-2043

  Petersen, Max ^a   Schulberg, Michelle T ^b   Gochberg, Lawrence A ^b  

^a ACCELRYS INC   (United States)

^b Novellus Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; DIELECTRIC MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; PROBABILITY DENSITY FUNCTION; SILICA;

GENERALIZED GRADIENT APPROXIMATION (GGA);

MICROELECTRONICS;

EID: 0037474952     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1564874     Document Type: Article

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