Production of Cr-N films by ion beam-assisted depostion technology: Experiment and computer simulation

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 286-292

  Guglya, A G ^a   Marchenko, I G ^b   Malykhin, D G ^a   Neklyudov, I M ^a  

^a KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

^b Scientific Center of Physical Technologies Kharkiv   (Ukraine)

Author keywords

Chromium; Computer Simulation; Film deposition; Ion beam assisted deposition; Nitrogen

Indexed keywords

CHROMIUM COMPOUNDS; COMPUTER SIMULATION; IRRADIATION; PRECIPITATION (CHEMICAL); PROTECTIVE COATINGS;

ION BEAM-ASSISTED DEPOSITION;

THIN FILMS;

CHROMIUM NITRIDE; DEPOSITION; FILM;

EID: 0037472615     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00614-X     Document Type: Article

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