Studies on single layer CeO2 and SiO2 films deposited by rotating crucible electron beam evaporation

Materials Science and Engineering: B

Volumn 98, Issue 1, 2003, Pages 38-44

  Narasimha Rao, K ^a   Shivlingappa, L ^a   Mohan, S ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

CeO2 and SiO2 films; Density of film; Electron beam evaporation; Optical properties; Structural properties; Substrate temperature

Indexed keywords

CERIUM COMPOUNDS; CRYSTALLINE MATERIALS; ELECTRON BEAMS; EVAPORATION; MIRRORS; OPTICAL FILMS; REFRACTIVE INDEX; SILICON COMPOUNDS; STOICHIOMETRY;

ROTATING CRUCIBLES;

THIN FILMS;

EID: 0037465466     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00599-8     Document Type: Article

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