Study on the design of anti-sticking structures in MEMS under different forces

Zhongguo Jixie Gongcheng/China Mechanical Engineering

Volumn 14, Issue 4, 2003, Pages 274-

  Ding, Jianning ^a   Fan, Zhen ^a   Li, Changsheng ^a   Wen, Shizhu ^a  

^a NONE

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EID: 0037465288     PISSN: 1004132X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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