Electric force microscopy testing of digital voltages using the heterodyne mixing technique

Journal of Physics D: Applied Physics

Volumn 36, Issue 6, 2003, Pages 748-752

  Behnke, U ^a   Klumper D ^a   Mertin, W ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL VOLTMETERS; ELECTRIC POTENTIAL; FAILURE ANALYSIS; HETERODYNING;

ELECTRON FORCE MICROSCOPY;

INTEGRATED CIRCUITS;

EID: 0037459330     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/6/318     Document Type: Article

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