Reduction of droplet of tantalum oxide using double slit in pulsed laser deposition

Vacuum

Volumn 70, Issue 1, 2003, Pages 47-52

  Hino, T ^a   Mustofa, S ^b   Nishida, M ^b   Araki, T ^b  

^a NIIHAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b EHIME UNIVERSITY   (Japan)

Author keywords

Double slit; Pulsed laser deposition; Reduction of droplets; Tantalum oxide

Indexed keywords

CORROSION RESISTANCE; EXCIMER LASERS; LASER ABLATION; MORPHOLOGY; PULSED LASER DEPOSITION; THIN FILMS;

DOUBLE SLIT METHOD;

TANTALUM COMPOUNDS;

EID: 0037458762     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00701-7     Document Type: Article

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