Rate equations model for layer epitaxial growth kinetics

Thin Solid Films

Volumn 428, Issue 1-2, 2003, Pages 66-71

  Trofimov, Vladimir I ^a   Mokerov, Vladimir G ^a  

^a INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

Ehrlich Schwoebel barrier; Epitaxial growth mechanisms and kinetics; Surface roughness

Indexed keywords

COALESCENCE; DIFFUSION; MULTILAYERS; REACTION KINETICS; SURFACE ROUGHNESS;

RATE EQUATIONS MODEL;

EPITAXIAL GROWTH;

EID: 0037457148     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01272-5     Document Type: Conference Paper

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