Identification and characterization of monomeric, volatile SiCl3NH2 as product of the reaction between SiCl4 and NH3: An important intermediate on the way to silicon nitride?

Chemistry - A European Journal

Volumn 9, Issue 6, 2003, Pages 1387-1393

  Himmel, Hans Jörg ^a   Schiefenhövel, Nils ^b   Binnewies, Michael ^b  

^a UNIVERSITY OF KARLSRUHE   (Germany)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Ammonolysis; Density functional calculations; IR spectroscopy; Mass spectrometry; Silanes

Indexed keywords

CHEMICAL REACTIONS; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; MONOMERS; QUANTUM THEORY; THERMODYNAMICS;

AMMONOLYSIS;

SILICON COMPOUNDS;

AMMONIA; SILANE DERIVATIVE; SILICON DERIVATIVE; SILICON NITRIDE;

ARTICLE; CALCULATION; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; QUANTUM CHEMISTRY; REACTION ANALYSIS; THERMODYNAMICS;

EID: 0037451441     PISSN: 09476539     EISSN: None     Source Type: Journal    
DOI: 10.1002/chem.200390158     Document Type: Article

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