Fabrication of a miniature twin-fuel-cell on silicon wafer

Electrochimica Acta

Volumn 48, Issue 11, 2003, Pages 1537-1541

  Yu, Jingrong ^a,b   Cheng, Ping ^a   Ma, Zhiqi ^a   Yi, Baolian ^b  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b DALIAN INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Interconnect resistance; Microfabrication; Miniature fuel cell; Silicon wafer; Twin fuel cell

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC CURRENTS; SILICA; SILICON WAFERS; SPUTTERING;

TWIN CELLS;

FUEL CELLS;

EID: 0037447781     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-4686(03)00034-3     Document Type: Article

References (13)

1. Mex L., Ponath N., Muller J. Fuel Cells Bull. 39:2002;9.
2. Meyers J.P., Maynard H.L. J. Power Sources. 109:2002;76.
3. Kelley S.C., Deluga G.A., Smyrl W.H. AIChE J. 48:2002;1071.
4. Kelley S.C., Deluga G.A., Smyrl W.H. Electrochem. Solid State Lett. 3:2000;407.
5. Sim W.Y., Kim G.Y., Yang S.S. IEEE Int. Conf. Microelectron. Mech. Syst. 14:2001;341.
6. S.J. Lee, S.W. Cha, Y. Liu, R. O'Hayer, F.B. Prinz, in: Proceedings of the 198th Electrochemical Society Meeting, Abstract 241, Phoenix, 22-27 October 2000.
7. Madou M. Fundamentals of Microfabrication. 1997;CRC Press, Boca Raton, FL.
8. Heinzel A., Nolte R., Ledjeff-Hey K., Zedda M. Electrochim. Acta. 43:1998;3871.
9. Heinzel A., Hebling C., Muller M., Zedda M., Muller C. J. Power Sources. 105:2002;250.
10. S.R. Narayanan, T.I. Valdez, F. Clara, Fuel Cell Seminar Abstracts, Vol. 795, Portland, OR, 30 October-2 November 2000.
11. R.G. Hockaday, M. Dejohn, C. Navas, P.S. Turner, H.L. Vaz, L.L. Vazul, Fuel Cell Seminar Abstracts, Vol. 791, Portland, OR, 30 October-2 November 2000.
12. R.G. Hockaday, US Patent No. 6-194-095 (2001).
13. Du X., Yu J., Yi B., Han M., Bi K. Phys. Chem. Chem. Phys. 3:2001;3175.