Adhesive contact of axisymmetric suspended miniature structure

Sensors and Actuators, A: Physical

Volumn 104, Issue 1, 2003, Pages 44-52

  Yang, Fuqian ^a  

^a UNIVERSITY OF KENTUCKY   (United States)

Author keywords

Adhesion energy; Contact; MEMS; Pull off force; Stiction

Indexed keywords

ADHESIVES; BOND STRENGTH (MATERIALS); STICTION; TENSILE STRESS; THERMODYNAMICS;

PULL-OFF FORCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0037445344     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00482-X     Document Type: Article

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