Direct drawing method for microfabrication based on selective metal plating technology

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 135-142

  Konishi, Satoshi ^a   Honsho, Kazuhiro ^a,b   Yanada, Masashi ^a   Minami, Isao ^a   Kimura, Yukie ^a   Ikeda, Shinji ^c  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b 33 Tanakamiya cho Takeda F   (Japan)

^c Metec Kitamura Co Ltd   (Japan)

Author keywords

Direct drawing method; Microfabrication; Selective metal plating technology

Indexed keywords

MACHINING; PHOTOLITHOGRAPHY; PLATING; SEMICONDUCTOR MATERIALS;

DIRECT DRAWING METHOD;

DRAWING (FORMING);

EID: 0037438783     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00309-6     Document Type: Conference Paper

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