TOF-SIMS characterization of industrial materials: From silicon wafer to polymer

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 541-546

  Karen, Akiya ^a   Man, Naoki ^a   Shibamori, Takahiro ^a   Takahashi, Kumiko ^a  

^a TORAY RESEARCH CENTER INC   (Japan)

Author keywords

Functional group; Oxygen effect; Polymer; Silicon; Surface contamination; TOF SIMS

Indexed keywords

ADSORPTION; CONTAMINATION; IONIZATION; ORGANIC POLYMERS; SECONDARY ION MASS SPECTROMETRY; SILICON WAFERS;

INDUSTRIAL MATERIALS;

SURFACE STRUCTURE;

EID: 0037438230     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00623-2     Document Type: Conference Paper

References (7)

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2. A. Karen, K. Ozawa, A. Ishitani, in: SIMS XI, Wiley, New York, 1998, p. 229.
3. G. Strossman, P. Lindley, W. Bowers, in: SIMS XI, Wiley, New York, 1998, p. 699.
4. M. Juhel, in: SIMS XII, Elsevier, Amsterdam, 2000, p. 409.
5. D.F. Reich, B.W. Schueler, F.A. Stevie, J.M. McKinley, C.N. Granger, in: SIMS XII, Elsevier, Amsterdam, 2000, p. 425.
6. Muraji Y., Yoshikawa K., Nakamura M., Nakagawa Y. J. Surf. Anal. 8:2001;201.
7. N. Man, A. Karen, A. Shimizu, A. Ishitani, in: SIMS XII, Elsevier, Amsterdam, 2000, p. 765.