Investigation of the depth range through ultra-thin carbon films on magnetic layers by time-of-flight secondary ion mass spectrometry

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 72-77

  Tadokoro, N ^a   Yuki, M ^a   Osakabe, K ^a  

^a HOYA CORPORATION   (Japan)

Author keywords

Escape depth; Incidence angle; Magnetic disk; Sampling depth; TOF SIMS; XPS

Indexed keywords

CARBON; MORPHOLOGY; PROTECTIVE COATINGS; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

MAGNETIC THIN FILMS;

EID: 0037438043     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00681-5     Document Type: Conference Paper

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