|
Volumn 51, Issue 5, 2003, Pages 1393-1407
|
The lateral growth strain accompanying the formation of a thermally grown oxide
|
Author keywords
Grain boundary diffusion; Mechanical properties; Modeling; Oxidation
|
Indexed keywords
COMPRESSIVE STRESS;
DIFFUSION;
GRAIN BOUNDARIES;
NEGATIVE IONS;
POSITIVE IONS;
LATERAL GROWTH STRAIN;
OXIDATION;
|
EID: 0037436771
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(02)00532-3 Document Type: Article |
Times cited : (254)
|
References (49)
|