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Volumn 82, Issue 10, 2003, Pages 1550-1552
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Porous silicon free-standing coupled microcavities
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
MICROELECTRONICS;
POROSITY;
REFRACTIVE INDEX;
SUBSTRATES;
COUPLED MICROCAVITIES (CMC);
POROUS SILICON;
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EID: 0037429888
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1559949 Document Type: Article |
Times cited : (61)
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References (10)
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