Characterization of SiN and other transient species in a silicon tetrachloride-nitrogen discharge

Chemical Physics Letters

Volumn 367, Issue 5-6, 2003, Pages 645-650

  Li, Peng ^a   Fan, Wai Yip ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037427755     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2614(02)01793-1     Document Type: Article

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