Intrinsic sheath edge conditions for sheath instability in low-pressure electronegative plasmas

Journal of Physics D: Applied Physics

Volumn 36, Issue 5, 2003, Pages 465-472

  Kono, Akihiro ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; IONIZATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; THERMAL EFFECTS;

ELECTRONEGATIVE PLASMAS; FLUID MODEL; SHEATH INSTABILITY;

PLASMA SHEATHS;

EID: 0037423940     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/5/308     Document Type: Article

References (13)

1. Kono A 1999 J. Phys. D: Appl. Phys. 32 1357
2. Sheridan T E 1999 J. Phys. D: Appl. Phys. 32 1761
3. Sheridan T E, Chabert P and Boswell R W 1999 Plasma Sources Sci. Technol. 8 457
4. Kouznetsov I G, Lichteberg A J and Lieberman M A 1999 J. Appl. Phys. 86 4142
5. Benilov M S and Franklin R N 1999 J. Plasma Phys. 62 541
6. Franklin R N 2000 Plasma Sources Sci. Technol. 9 191
7. Kono A 2001 J. Phys. D: Appl. Phys. 34 1083
8. Kono A 2001 Proc. Int. Conf. on Phenomena in Ionized Gases vol 3, p 167
9. Franklin R N and Snell J 2000 J. Phys. D: Appl. Phys. 33 1990
10. Valentini H-B 2000 Plasma Sources Sci. Technol. 9 574
11. Riemann K-U 1991 J. Phys. D: Appl. Phys. 24 493
12. Zawaiden E, Kim N S and Najmabadi F 1990 Phys. Fluids B 2 647
13. Kono A 2002 Appl. Surf. Sci. 192 115