Fabrication and properties of silicon-based PZT thin films for MFSFET applications

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 554-560

  Ren, Tian Ling ^a   Shao, Tian Qi ^a   Zhang, Wu Quan ^a   Li, Chun Xiao ^a   Liu, Jian She ^a   Liu, Li Tian ^a   Zhu, Jun ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Ferroelectric thin film; FET; Metal ferroelectric semiconductor (MFS); PZT; Sol gel

Indexed keywords

ANNEALING; CAPACITORS; LEAD COMPOUNDS; MESFET DEVICES; SOL-GELS;

POLARIZATION VOLTAGES;

THIN FILMS;

EID: 0037393303     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00965-6     Document Type: Conference Paper

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