Preparation of Ba2Si2TiO8 thin films by magnetron sputtering

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 745-749

  Zhu, M K ^a   Yang, Y H ^a   Li, X H ^a   Wang, B ^a   Wang, H ^a   Yan, H ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Ba2Si2TiO8; Fresnoite; Magnetron sputtering; Thin film

Indexed keywords

ANNEALING; CRYSTALLIZATION; ENERGY DISPERSIVE SPECTROSCOPY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

FRESNOITES;

THIN FILMS;

EID: 0037391761     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00994-2     Document Type: Article

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