Quality assurance in nano-scale analysis

Applied Physics A: Materials Science and Processing

Volumn 76, Issue 6, 2003, Pages 919-921

  Senoner, M ^a   Unger, W ^a   Reiners, G ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; ION BEAMS; NANOSTRUCTURED MATERIALS; NUMERICAL METHODS; QUALITY CONTROL; STANDARDIZATION; TRANSMISSION ELECTRON MICROSCOPY;

NANO-SCALE ANALYSIS;

NANOTECHNOLOGY;

EID: 0037389505     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-002-1976-5     Document Type: Conference Paper

References (6)

1. ISO/EC 17 025: General requirements for the competence of testing and calibration laboratories (1999)
2. ISO 5725: Accuracy (trueness and precision) of measurement methods and results, parts 1 and 2 (1994)
3. G. Binnig, C.F. Quate, C. Gerber: Phys. Rev. Lett. 56, 930 (1986)
4. M. Senoner, L. Koenders, W. Unger, G. Wilkening: accepted for publication in Precis. Eng.
5. L. Koenders, R. Krüger-Sehm, G. Wilkening: In Proc. 4th Semin. Quant. Microsc., Semmering, Austria, 2000, ed. by H. Hasche, W. Mirandé, G. Wilkening (PTB Ber. F-39) (PTB, Braunschweig 2000) pp. 25-29
6. M. Senoner: Materialprüfung 43, 298 (2001)