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Volumn 218, Issue 4-6, 2003, Pages 325-332
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Interference technique by three equal-intensity umbrellalike beams with a diffractive beam splitter for fabrication of two-dimensional trigonal and square lattices
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Author keywords
Holographic interferometry; Interference; Lithography; Microstructure fabrication; Photonic crystals; Polarization
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Indexed keywords
CRYSTAL LATTICES;
CRYSTAL MICROSTRUCTURE;
ELECTROMAGNETIC WAVE DIFFRACTION;
ELECTROMAGNETIC WAVE POLARIZATION;
HOLOGRAPHY;
LITHOGRAPHY;
OPTICAL BEAM SPLITTERS;
PHOTONIC CRYSTALS;
ELECTROMAGNETIC WAVE INTERFERENCE;
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EID: 0037383356
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-4018(03)01231-8 Document Type: Article |
Times cited : (5)
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References (14)
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