Direct simulation Monte Carlo method for gas cluster ion beam technology

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 202, Issue , 2003, Pages 283-288

  Insepov, Z ^a   Yamada, I ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Body fitted coordinate; Cluster size; Direct simulation Monte Carlo; Supersonic nozzle

Indexed keywords

ARGON; COMPUTER SIMULATION; MONTE CARLO METHODS; NOZZLES;

CLUSTERS;

ION BEAMS;

EID: 0037379007     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01870-0     Document Type: Conference Paper

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