Characterization and dielectric properties of (SrTiO3/BaTiO3)n multilayer thin films deposited on Pt/Ti/SiO2/Si substrates by double rf magnetron sputtering

Solid State Communications

Volumn 125, Issue 11-12, 2003, Pages 633-636

  Hsi, Chi Shiung ^a   Shiao, Fu Yuan ^b   Wu, Nan Chung ^b   Wang, Moo Chin ^c  

^a I SHOU UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

A. SrTiO3 BaTiO3 thin films; D. Dielectric; E. Double target rf magnetron sputtering

Indexed keywords

DEPOSITION; DIELECTRIC PROPERTIES; ELECTRIC POTENTIAL; MAGNETRON SPUTTERING; MULTILAYERS; POLARIZATION; X RAY DIFFRACTION ANALYSIS;

COERCIVE FIELDS;

THIN FILMS;

EID: 0037370284     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(02)00891-8     Document Type: Article

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