Formation of oligomer species in the course of the TiCl4 ammonolysis and their role in Ti(IV)-Ti(III) reduction processes: A theoretical study

Computational Materials Science

Volumn 27, Issue 1-2, 2003, Pages 109-116

  Timoshkin, A Y ^a   Siodmiak, M ^a   Korkin, A A ^b   Frenking, G ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b MOTOROLA INC   (United States)

Author keywords

Chemical vapor deposition; Modelling; Oligomerization reactions; Quantum chemistry; TiN

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DIMERIZATION; QUANTUM THEORY; REDUCTION; TITANIUM NITRIDE;

ENDOTHERMICITY;

OLIGOMERS;

EID: 0037370123     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0256(02)00433-0     Document Type: Conference Paper

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