Computation speedup in the dynamic simulation of MEMS by macromodels

Progress in Natural Science

Volumn 13, Issue 3, 2003, Pages 219-227

  Lin, Wuzhong ^a   Liang, Yanchun ^a,b   Lee, Kwok Hong ^c   Lim, Siak Piang ^c   Lee, Heow Pueh ^a  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^b JILIN UNIVERSITY   (China)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Macromodels; MEMS; Model order reduction; Proper orthogonal decomposition

Indexed keywords

ELECTROMECHANICAL DEVICES; EQUIVALENT CIRCUITS; NUMERICAL METHODS; PRINCIPAL COMPONENT ANALYSIS;

DOUBLY-CLAMPED MICROBEAM; DYNAMICS SIMULATION; GAS-FILM DAMPING; MACRO-MODELS; MICRO-DEVICE; MODEL ORDER REDUCTION; ORTHOGONAL DECOMPOSITION; PROPER ORTHOGONAL; PROPER ORTHOGONAL DECOMPOSITION; REDUCED ORDER;

MEMS;

EID: 0037363384     PISSN: 10020071     EISSN: None     Source Type: Journal    
DOI: 10.1360/03jz9039     Document Type: Article

References (11)