Anatase-phase titanium oxide by low temperature oxidation of metallic Ti thin film

Scripta Materialia

Volumn 48, Issue 6, 2003, Pages 659-663

  Lee, Kee Sun ^a   Park, In Soo ^a  

^a Kongju National University   (South Korea)

Author keywords

Annealing; Crystallization; Hydrophilic; Oxidation; Thin film; Titanium

Indexed keywords

ANNEALING; CRYSTALS; HYDROPHILICITY; LOW TEMPERATURE EFFECTS; OXIDATION; TITANIUM OXIDES; VAPORS; WATER; WETTING;

LOW TEMPERATURE OXIDATION;

THIN FILMS;

EID: 0037352168     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(02)00561-4     Document Type: Article

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