Robust controller design for PTP motion of vertical XY positioning systems with a flexible beam

IEEE/ASME Transactions on Mechatronics

Volumn 8, Issue 1, 2003, Pages 99-110

  Kim, Bong Keun ^a,b   Park, Sangdeok ^c   Chung, Wan Kyun ^a   Youm, Youngil ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Research Institute of Industrial Science and Technology (RIST)   (South Korea)

Author keywords

Flexible XY positioning system; Input preshaping; Residual vibration suppression; Robust internal loop compensator (RIC)

Indexed keywords

ALGORITHMS; CLOSED LOOP CONTROL SYSTEMS; FEEDBACK CONTROL; MOTION CONTROL; POSITION CONTROL; VIBRATION CONTROL;

FEEDFORWARD CONTROL;

ROBUSTNESS (CONTROL SYSTEMS);

EID: 0037349237     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2003.809163     Document Type: Article

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