High-temperature bulge-test setup for mechanical testing of free-standing thin films

Review of Scientific Instruments

Volumn 74, Issue 3 I, 2003, Pages 1383-1385

  Kalkman, A J ^a   Verbruggen, A H ^a   Janssen, G C A M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CREEP; LASER BEAMS; OXIDATION; PLASTIC DEFORMATION; STRESS ANALYSIS; THERMAL EXPANSION;

VACUUM CHAMBERS;

THIN FILMS;

EID: 0037348584     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1539901     Document Type: Article

References (12)

1. R. P. Vinci and J. J. Vlassak, Annu. Rev. Mater. Sci. 26, 431 (1996).
2. J. A. Ruud, D. Josell, F. Spaepen, and A. L. Greer, J. Mater. Res. 8, 112 (1993).
3. R. P. Vinci, G. Cornelia, and J. C. Bravman, AIP Conf. Proc. 491, 240 (1999).
4. T. Tsakalakos, Thin Solid Films 75, 293 (1981).
5. J. J. Vlassak and W. D. Nix, J. Mater. Res. 7, 3242 (1992).
6. P. A. Flinn, Mater. Res. Soc. Symp. Proc. 130, 41 (1989).
7. A. J. Kalkman, A. H. Verbruggen, G. C. A. M. Janssen, and F. H. Groen, Rev. Sci. Instrum. 70, 4026 (1999).
8. Low density graphite rings were obtained from Le Carbone Lorraine, Rotterdam, The Netherlands.
9. E. I. Bromley, J. N. Randall, D. C. Flanders, and R. W. Mountain, J. Vac. Sci. Technol. B l, 1364 (1983).
10. A. J. Kalkman, A. H. Verbruggen, and G. C. A. M. Janssen, Appl. Phys. Lett. 78, 2673 (2001).
11. M. K. Small and W. D. Nix, J. Mater. Res. 7, 1553 (1992).
12. H. J. Frost, Mater. Res. Soc. Symp. Proc. 265, 3 (1992).