Construction and performance of an ultrahigh vacuum-compatible high temperature vapor dosing system for low vapor pressure compounds

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 2, 2003, Pages 491-494

  Thompson, L ^a   Lee, J G ^a   Maksymovych, P ^a   Ahner, J ^a   Yates, J T ^a  

^a UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CONDENSATION; SURFACE PROPERTIES; THERMAL EFFECTS; ULTRAHIGH VACUUM; VACUUM APPLICATIONS; VAPOR PRESSURE;

VAPOR DOSING SYSTEMS;

DOSIMETERS;

EID: 0037348376     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1550011     Document Type: Article

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