Sputter deposition of a spongelike morphology in metal coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 2, 2003, Pages 422-425

  Jankowski, A F ^a   Hayes, J P ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; POROSITY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION;

GAS PRESSURE;

METALLIC FILMS;

EID: 0037348183     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1545759     Document Type: Article

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